NO gas sensing at room temperature using single titanium oxide nanodot sensors created by atomic force microscopy nanolithography

• Li-Yang Hong and
• Heh-Nan Lin

Beilstein J. Nanotechnol. 2016, 7, 1044–1051, doi:10.3762/bjnano.7.97

• potential application of single metal oxide NDs for gas sensing with a performance that is comparable with that of metal oxide nanowire gas sensors. Keywords: atomic force microscopy nanolithography; photo-activation; photo-recovery; resistive NO gas sensor; titanium oxide nanodot sensor; Introduction In

• -assisted approaches including photo-activation [12][13][14][15][16][17][18][19][20][21] and photo-recovery [22][23] have been shown effective to enable gas sensing at room temperature. The sensing material in a semiconducting metal oxide sensor is commonly synthesized by a bottom-up approach, such as

• atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with contact electrodes and a single titanium oxide ND is subsequently produced in the NW. Gas sensing is realized by the photo-activation and the photo