Electrostatic pull-in application in flexible devices: A review

• Teng Cai,
• Yuming Fang,
• Yingli Fang,
• Ruozhou Li,
• Ying Yu and
• Mingyang Huang

Beilstein J. Nanotechnol. 2022, 13, 390–403, doi:10.3762/bjnano.13.32

• Technology, Nanjing University of Posts and Telecommunications, Nanjing, China 10.3762/bjnano.13.32 Abstract The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted

• researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices. Keywords: electrostatics; MEMS; microfluidics; NEM switches; pull-in; Introduction It has become

• earliest and most mature actuation mechanisms used in flexible MEMS devices. Because of its simple structure and convenience for integrated manufacturing, it is one of the most actively researched driving actuation [1]. There are typical pull-in phenomena in electrostatic MEMS devices. Previous research

Vibration analysis and pull-in instability behavior in a multiwalled piezoelectric nanosensor with fluid flow conveyance

• Sayyid H. Hashemi Kachapi

Beilstein J. Nanotechnol. 2020, 11, 1072–1081, doi:10.3762/bjnano.11.92

• Sayyid H. Hashemi Kachapi Department of Mechanical Engineering, Babol Noshirvani University of Technology, P.O. Box 484, Shariati Street, Babol, Mazandaran 47148-71167, Iran 10.3762/bjnano.11.92 Abstract In this work, surface/interface effects for pull-in voltage and viscous fluid velocity

• constants, residual stress, piezoelectric constants and mass density, are considered for analysis of the dimensionless natural frequency with respect to the viscous fluid velocity and pull-in voltage of the FC-MWPENSs. Keywords: electrostatic excitation; piezoelectric nanosensor; pull-in voltage; stability

• . investigated the effect of nonzero initial conditions, the nonlinear coefficient of squeeze film air damping, and the van der Waals effect on the stability of torsional nanomirrors for the obtained dynamic pull-in instability voltage using the size effect [14]. Fakhrabadi et al. utilized the modified couple

Electrostatically actuated encased cantilevers

• Benoit X. E. Desbiolles,
• Gabriela Furlan,
• Adam M. Schwartzberg,
• Paul D. Ashby and
• Dominik Ziegler

Beilstein J. Nanotechnol. 2018, 9, 1381–1389, doi:10.3762/bjnano.9.130

• breakthrough voltage of about 40 V of the sacrificial layer (see C3 in Figure 1a). For the used geometry this limits the maximum static deflection to about 200 pm. The pull-in deflection, where the electrostatic force exceeds the mechanical restoring force and the cantilever would snap in contact with the

• encasement represents the next limit. However, pull-in deflection is generally reached at one third of the gap, i.e., at 4 μm, which is orders of magnitude larger than the breakthrough-limited static deflection. With the relatively stiff cantilever used the attainable amplitude of a few nanometers might seem

Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

• Liga Jasulaneca,
• Jelena Kosmaca,
• Raimonds Meija,
• Jana Andzane and
• Donats Erts

Beilstein J. Nanotechnol. 2018, 9, 271–300, doi:10.3762/bjnano.9.29

• different operation states can be used, as it was shown for a 2T TiN NEM switch [48] (Figure 3). The off state is established when the switching element is separated from the contact electrode (Figure 3, state A), and two successive on states with different pull-in voltages (Figure 3, states B and C) can be

• fabrication in addition to such benefits as high stiffness (Young’s modulus 447 GPa), hardness (5 GPa), and high melting point (2333 °C [116]). Ru-based NEM relays with small gap widths have shown an even smaller coupling area than that of Cu-based devices, with a pull-in voltage of 5 V [18], together with

Probing fibronectin–antibody interactions using AFM force spectroscopy and lateral force microscopy

• Andrzej J. Kulik,
• Małgorzata Lekka,
• Kyumin Lee,
• Grazyna Pyka-Fościak and
• Wieslaw Nowak

Beilstein J. Nanotechnol. 2015, 6, 1164–1175, doi:10.3762/bjnano.6.118

• molecules are pulled apart in the normal direction, they presumably unbind along a different reaction coordinate from the pull in the lateral (inclined) direction. In such a case, one may expect that the energy landscape (and hence the dissociation rate and width of the energy barrier) should be very

Size-dependent characteristics of electrostatically actuated fluid-conveying carbon nanotubes based on modified couple stress theory

• Mir Masoud Seyyed Fakhrabadi,
• Abbas Rastgoo and
• Mohammad Taghi Ahmadian

Beilstein J. Nanotechnol. 2013, 4, 771–780, doi:10.3762/bjnano.4.88

• to study the manipulation of CNTs by using electrostatic actuation and vdW interactions. The results revealed that the vdW force played an important role in the deflection and pull-in behaviors of the CNTs. In electrostatic actuation, a voltage is applied to two electrodes with a gap in-between. In

• the pull-in voltage and is to be discussed in detail in the following sections. In another paper, Dequesnes et al. [15] studied the static pull-in behaviors of the CNTs as well as their natural frequencies under electrostatic actuation, and the vdW interactions and compared some of the results with

• applied force and the resultant deformation. In this paper, the effects of a fluid flow on the static and dynamic pull-in instabilities of the CNTs with cantilever and doubly clamped boundary conditions are investigated. The pull-in voltages of the CNTs for various fluid parameters including fluid