This Thematic Series covers all relevant aspects of focused electron beam induced processing (FEBIP) and in particular focused electron beam induced deposition (FEBID), including:
the fundamental electron–precursor interactions leading to precursor fragmentation,
the surface reactions initiated by these interactions,
the design and synthesis of novel FEBID precursors, and
advances in the performance of FEBID processes with respect to deposit purity, spatial resolution, and processing speed.
The performance of these nanofabrication processes and the properties of the resulting nanomaterials depend decisively on how precisely the underlying chemistry can be controlled. In fact, it is the interplay of electron-induced and thermal precursor chemistry together with the reactivity of the surface where these reactions take place that determines the composition and the spatial resolution of deposits fabricated by FEBID. This calls for the development of novel precursors designed specifically for electron beam driven processing and of optimized processes with respect to surface chemistry or added purification reagents, taking also into consideration new developments in precursor supply instrumentation.
Additional articles on this topic will be published here soon.
Beilstein J. Nanotechnol. 2017, 8, 801–812, doi:10.3762/bjnano.8.83