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Anodization-based process for the fabrication of all niobium nitride Josephson junction structures

Massimiliano Lucci1, Ivano Ottaviani1, Matteo Cirillo1,2, Fabio De Matteis3, Roberto Francini3, Vittorio Merlo1 and Ivan Davoli1
1Dipartimento di Fisica and MINAS Lab, Università di Roma Tor Vergata, 00133 Roma, Italy
2CNR-SPIN Institute, Via Giovanni Paolo II, 84084 Fisciano (SA), Italy
3Dipartimento di Ingegneria Industriale, Università di Roma “Tor Vergata”, Via del Politecnico, 00133 Roma, Italy
Email of corresponding author Corresponding author email     
This article is part of the Thematic Series "Self-assembly of nanostructures and nanomaterials II".
Guest Editor: I. Berbezier
Beilstein J. Nanotechnol. 2017, 8, 539–546.
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© 2017 Lucci et al.; licensee Beilstein-Institut.
This is an Open Access article under the terms of the Creative Commons Attribution License (, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
The license is subject to the Beilstein Journal of Nanotechnology terms and conditions: (