Understanding interferometry for micro-cantilever displacement detection

Alexander von Schmidsfeld, Tobias Nörenberg, Matthias Temmen and Michael Reichling
Beilstein J. Nanotechnol. 2016, 7, 841–851. https://doi.org/10.3762/bjnano.7.76

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Supporting Information File 1: Profile of interferometric patterns in all planes.
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Understanding interferometry for micro-cantilever displacement detection
Alexander von Schmidsfeld, Tobias Nörenberg, Matthias Temmen and Michael Reichling
Beilstein J. Nanotechnol. 2016, 7, 841–851. https://doi.org/10.3762/bjnano.7.76

How to Cite

von Schmidsfeld, A.; Nörenberg, T.; Temmen, M.; Reichling, M. Beilstein J. Nanotechnol. 2016, 7, 841–851. doi:10.3762/bjnano.7.76

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