1 article(s) from Furlan, Gabriela
- Full Research Paper
- Published 08 May 2018
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Figure 1: a) Cross section of an encased cantilever for electrostatic excitation. The electrical wiring and t...
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Figure 2: a) Amplitude (blue line) and phase (red dashed line) of the cantilever actuated using piezoacoustic...
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Figure 3: a) The amplitude increases linearly with the electrostatic drive signal (Uac), Udc is held constant...
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Figure 4: a) Oscillation amplitude at the resonance frequency of the cantilever induced by sub-harmonic excit...
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Figure 5: Measurement of the small downward deflection of the cantilever when varying the dc component (Udc − ...
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Figure 6: a) Longitudinal section of a cantilever with critical dimensions. The arrows illustrate the uniform...
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