Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

Patrick Philipp,
Lukasz Rzeznik and
Tom Wirtz

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Published 17 Nov 2016

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1. Figure 1: Initial sample composition for a) sample #1, b) sample #2, and c) sample #3. All samples have inter...
  
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2. Figure 2: Sample composition as a function of depth and primary ion fluence for 1 keV He⁺ irradiation of samp...
  
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3. Figure 3: Sample composition as a function of depth and primary ion fluence for 1 keV He⁺ irradiation of samp...
  
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4. Figure 4: Sample composition as a function of depth and primary ion fluence for 20 keV Ne⁺ irradiation of sam...
  
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5. Figure 5: Sample composition as a function of depth and primary ion fluence for 20 keV Ar⁺ irradiation of sam...
  
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6. Figure 6: Simulated depth profiles for a) 20 keV Ne⁺ irradiation of sample #1 with 10 nm and 20 nm inter-laye...
  
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7. Figure 7: Sample composition as a function of depth and primary ion fluence for 1 keV Ne⁺ irradiation of samp...
  
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8. Figure 8: Sample composition as a function of depth and primary ion fluence for 1 keV Ne⁺ irradiation of samp...
  
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9. Figure 9: Simulated depth profiles for a) 1 keV Ne⁺ irradiation of sample #1, b) 1 keV Ne⁺ irradiation of sam...
  
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10. Figure 10: Simulated depth profiles for a) 1 keV Ne⁺ irradiation of sample #2, b) 1 keV Ar⁺ irradiation of sam...
  
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Beilstein J. Nanotechnol. 2016, 7, 1749–1760, doi:10.3762/bjnano.7.168

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Experimental and simulation-based investigation of He, Ne and Ar irradiation of polymers for ion microscopy

Lukasz Rzeznik,
Yves Fleming,
Tom Wirtz and
Patrick Philipp

Full Research Paper
Published 02 Aug 2016

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1. Figure 1: Changing topography of PMMA bombarded by 5.5 keV Ne⁺ as a function of fluence (FOV: 1 × 1 µm²).
  
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2. Figure 2: RMS roughness changing with primary He⁺ and Ne⁺ fluence when bombarding (a) PMMA and (b) PS.
  
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3. Figure 3: Displacement of He, Ne and Ar from their initial positions in HD-PMMA sample at 300 K. No periodic ...
  
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4. Figure 4: Mean square displacement (MSD) of helium, neon and argon at 300 K in a) HD-PE, b) HD-PS, c) HD-PMMA...
  
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5. Figure 5: Implantation profiles in polyethylene obtained by SD_TRIM_SP for diffusion coefficient ranging from...
  
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6. Figure 6: Surface sputtering vs swelling for different diffusion coefficients for helium irradiation of PE.
  
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7. Figure 7: Evolution of sputter yields with fluence for a) helium, b) neon, and c) argon bombardment of PE at ...
  
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8. Figure 8: Evolution of sputter yields with fluence for a) helium, b) neon, and c) argon bombardment of PTFE a...
  
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9. Figure 9: Evolution of sputter yields with fluence for a) helium, b) neon, and c) argon bombardment of PMMA a...
  
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10. Figure 10: Partial sputter yields for the different chemical elements sputtered from a) PTFE, b) PE, c) PMMA, ...
  
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11. Figure 11: Surface composition as a function of impact energy for helium, neon and argon bombardment of a) F a...
  
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12. Figure 12: Concentration profiles of F and C at a fluence of 10¹⁸ ions/cm² for He, Ne and Ar bombardment of PT...
  
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13. Figure 13: Concentration profiles of H and C at a fluence of 10¹⁸ ions/cm² for He, Ne and Ar bombardment of PE...
  
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