1 article(s) from Szeghalmi, Adriana

Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir

  • Mathias Franz,
  • Romy Junghans,
  • Paul Schmitt,
  • Adriana Szeghalmi and
  • Stefan E. Schulz

Beilstein J. Nanotechnol. 2020, 11, 1439–1449, doi:10.3762/bjnano.11.128

Graphical Abstract
Full Research Paper
Published 23 Sep 2020
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