TY - JOUR A1 - Glessi, Cristiano A1 - Mahgoub, Aya A1 - Hagen, Cornelis W. A1 - Tilset, Mats T1 - Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition JF - Beilstein Journal of Nanotechnology PY - 2021/// VL - 12 SP - 257 EP - 269 SN - 2190-4286 DO - 10.3762/bjnano.12.21 PB - Beilstein-Institut JA - Beilstein J. Nanotechnol. UR - https://doi.org/10.3762/bjnano.12.21 KW - Au(I) precursors KW - focused electron beam-induced deposition (FEBID) KW - gold-NHC KW - gold precursors KW - nanofabrication KW - N-heterocyclic carbene N2 - Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 Ɨ 10āˆ’2 nm3/eāˆ’. ER -