TY - JOUR A1 - Deinhart, Victor A1 - Kern, Lisa-Marie A1 - Kirchhof, Jan N. A1 - Juergensen, Sabrina A1 - Sturm, Joris A1 - Krauss, Enno A1 - Feichtner, Thorsten A1 - Kovalchuk, Sviatoslav A1 - Schneider, Michael A1 - Engel, Dieter A1 - Pfau, Bastian A1 - Hecht, Bert A1 - Bolotin, Kirill I. A1 - Reich, Stephanie A1 - Höflich, Katja T1 - The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication JF - Beilstein Journal of Nanotechnology PY - 2021/// VL - 12 SP - 304 EP - 318 SN - 2190-4286 DO - 10.3762/bjnano.12.25 PB - Beilstein-Institut JA - Beilstein J. Nanotechnol. UR - https://doi.org/10.3762/bjnano.12.25 KW - automated patterning KW - focused He ion beam KW - graphene KW - magnetic multilayers KW - mechanical resonator KW - pattern generation KW - plasmonic antennas KW - two-dimensional materials N2 - Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat for automated pattern creation and optimization, providing full flexibility to accomplish demanding patterning tasks. FIB-o-mat offers high-level pattern creation, enabling high-fidelity large-area patterning and systematic variations in geometry and raster settings. It also offers low-level beam path creation, providing full control over the beam movement and including sophisticated optimization tools. Three applications showcasing the potential of He ion beam nanofabrication for two-dimensional material systems and devices using FIB-o-mat are presented. ER -