TY - JOUR A1 - Schaal, Patrick A. A1 - Simon, Ulrich T1 - Guided immobilisation of single gold nanoparticles by chemical electron beam lithography JF - Beilstein Journal of Nanotechnology PY - 2013/// VL - 4 SP - 336 EP - 344 SN - 2190-4286 DO - 10.3762/bjnano.4.39 PB - Beilstein-Institut JA - Beilstein J. Nanotechnol. UR - https://doi.org/10.3762/bjnano.4.39 KW - 2D pattern KW - indium tin oxide (ITO) KW - positioning KW - SAM KW - self-assembly N2 - The fabrication of periodic arrays of single metal nanoparticles is of great current interest. In this paper we present a straight-forward three-step procedure based on chemical electron beam lithography, which is capable of producing such arrays with gold nanoparticles (AuNPs). Preformed 6 nm AuNPs are immobilised on thiol patterns with a pitch of 100 nm by guided self-assembly. Afterwards, these arrays are characterised by using atomic force microscopy. ER -