TY - JOUR A1 - Salvat-Pujol, Francesc A1 - Valentí, Roser A1 - Werner, Wolfgang S. T1 - Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments JF - Beilstein Journal of Nanotechnology PY - 2015/// VL - 6 SP - 1260 EP - 1267 SN - 2190-4286 DO - 10.3762/bjnano.6.129 PB - Beilstein-Institut JA - Beilstein J. Nanotechnol. UR - https://doi.org/10.3762/bjnano.6.129 KW - focused-electron-beam-induced deposition (FEBID) KW - Monte Carlo simulation of electron transport KW - surface excitations KW - secondary-electron emission N2 - The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations. ER -