Sustainable fabrication of 2D-based devices through reuse of substrates with microfabricated electrodes

Submitting author affiliation:
2D Foundry Research Group, Instituto de Ciencia de Materiales de Madrid (ICMM-CSIC), 28049 Madrid, Spain; Universidad Autónoma de Madrid, Escuela de Doctorado, Madrid, 28049, Spain, Madrid, Spain

Beilstein Arch. 2026, 20264. https://doi.org/10.3762/bxiv.2026.4.v1

Published 28 Jan 2026

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Abstract

Fabricating microelectronic devices for two-dimensional (2D) materials research is essential but often limited by the high cost and need for specialized facilities. This study presents an efficient and sustainable method for cleaning and reusing substrates with pre-patterned electrodes. The cleaning protocol involves the use of an ultrasonic bath in warm N-methyl-2-pyrrolidone (NMP), enabling the removal of 2D materials without damaging the electrodes. This method significantly reduces costs and encourages more responsible use of resources in 2D materials device fabrication.

Keywords: 2D device fabrication; microfabricated electrode; N-methyl-2-pyrrolidone; substrate reuse; ultrasonic cleaning

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When a peer-reviewed version of this preprint is available, this information will be updated in the information box above. If no peer-reviewed version is available, please cite this preprint using the following information:

Zhang, Y.; Sozen, Y.; Zamora-Amo, E.; Pucher, T.; Jiménez-Arévalo, N.; Sofer, Z.; Xie, Y.; Castellanos-Gomez, A. Beilstein Arch. 2026, 20264. doi:10.3762/bxiv.2026.4.v1

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