Hierarchically patterned polyurethane microgrooves featuring nanopillars or nanoholes for neurite elongation and alignment

• Lester Uy Vinzons,
• Guo-Chung Dong and
• Shu-Ping Lin

Beilstein J. Nanotechnol. 2023, 14, 1157–1168, doi:10.3762/bjnano.14.96

• . ratio 1:0.7) at 5000 rpm and soft-baked at 95 °C for 160 s. An array of polystyrene nanospheres (1.1 µm) embedded in PDMS was placed in conformal contact with the SU-8, and then exposure was performed at a dose of 35–42 mJ·cm−2 (Figure 1A(i)). (Older PS-NS/PDMS films seem to require slightly higher UV

• (in PDMS) in conformal contact with the photoresist (Figure 1A(i)). AZ1518 was developed with AZ 300 MIF developer for 30 s, followed by rinsing with ultrapure water and N2 drying (Figure 1A(v)). The nanopatterned AZ1518 was finally post-baked at 120 °C for 2 min to improve substrate adhesion. PDMS (A

• glass slide at 5000 rpm and soft-baked at 95 °C for 2 min. The PDMS nanopillar array was placed in conformal contact with the SU-8, and then the sample was baked at 95 °C for 5 min for thermal reflow of the SU-8 (Figure 1A(vii)). The sample was allowed to cool down to RT and then was flood-exposed at a

Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor

• Mathias Franz,
• Mahnaz Safian Jouzdani,
• Lysann Kaßner,
• Marcus Daniel,
• Frank Stahr and
• Stefan E. Schulz

Beilstein J. Nanotechnol. 2023, 14, 951–963, doi:10.3762/bjnano.14.78

• of layer thickness while achieving better conformal coatings than any other deposition technique. The commonly used ALD database “Atomic Limits” [7] (based on the reviews of Puurunen [8], Miikkulainen et al. [9], Knoops et al. [10], and Mackus et al. [11]) currently lists 23 different ALD processes

Role of titanium and organic precursors in molecular layer deposition of “titanicone” hybrid materials

• Arbresha Muriqi and
• Michael Nolan

Beilstein J. Nanotechnol. 2022, 13, 1240–1255, doi:10.3762/bjnano.13.103

• deposition of conformal and smooth films with a controlled thickness at Angstrom level [3][9]. The advantages offered by hybrid organic–inorganic MLD films are that they are ultrathin films with high flexibility, have tunable properties and excellent mechanical and electronic properties resulting from the

Design of surface nanostructures for chirality sensing based on quartz crystal microbalance

• Yinglin Ma,
• Xiangyun Xiao and
• Qingmin Ji

Beilstein J. Nanotechnol. 2022, 13, 1201–1219, doi:10.3762/bjnano.13.100

• structure. The research group also prepared chiral Al2O3 films by a similar process using SAMs of cysteine (Cys) and KAl2(AlSi3O10)(OH)2 precursors (Figure 10) [121]. The resultant Al2O3 films were efficiently deposited on the SAMs and formed a very smooth and conformal film with a thickness of (8.9 ± 0.1

9.1% efficient zinc oxide/silicon solar cells on a 50 μm thick Si absorber

• Rafal Pietruszka,
• Bartlomiej S. Witkowski,
• Monika Ozga,
• Katarzyna Gwozdz,
• Ewa Placzek-Popko and
• Marek Godlewski

Beilstein J. Nanotechnol. 2021, 12, 766–774, doi:10.3762/bjnano.12.60

• deposited via ALD. The use of ALD here is very advantageous, since this technique allows for a uniform and conformal coating of the rods. In the same ALD process, MZO was deposited on a polished silicon substrate (sample B). Energy-dispersive X-ray spectroscopy was used to estimate the atomic concentrations

Prediction of Co and Ru nanocluster morphology on 2D MoS₂ from interaction energies

• Cara-Lena Nies and
• Michael Nolan

Beilstein J. Nanotechnol. 2021, 12, 704–724, doi:10.3762/bjnano.12.56

• -quality, conformal thin films with low resistivity, to avoid many of the typical failure mechanisms such as electromigration [42][43]. This means that 3D migration of atoms (agglomeration) should be inhibited, while 2D growth (wetting) should be promoted. In contrast, in catalysis applications the ratio

A stretchable triboelectric nanogenerator made of silver-coated glass microspheres for human motion energy harvesting and self-powered sensing applications

• Hui Li,
• Yaju Zhang,
• Yonghui Wu,
• Hui Zhao,
• Weichao Wang,
• Xu He and
• Haiwu Zheng

Beilstein J. Nanotechnol. 2021, 12, 402–412, doi:10.3762/bjnano.12.32

• process, (b) it shows stable output and long working life, which provides sustainable electricity, and (c) due to the unique structural design of the device and the high elasticity of the silicone rubber, the S-TENG can be stretched easily to 300% to realize a conformal assembly in stretchable electronic

Toward graphene textiles in wearable eye tracking systems for human–machine interaction

• Ata Jedari Golparvar and
• Murat Kaya Yapici

Beilstein J. Nanotechnol. 2021, 12, 180–189, doi:10.3762/bjnano.12.14

• technologies. Materials and Methods Synthesis of graphene textiles and electrode preparation The developed process to synthesize conductive graphene textiles is based on a low-cost and scalable, three-step approach in which conformal layers of graphene were formed on various fabrics including nylon, polyester

• tailored explicitly to EOG-based human–computer/robot interaction (HCI/HRI). (a) Schematic of the three-step process to obtain conformal graphene coatings on a variety of textiles including nylon, cotton, and polyester; (b) image of the graphene textile “active” electrode with integrated buffer circuitry

Atomic layer deposited films of Al₂O₃ on fluorine-doped tin oxide electrodes: stability and barrier properties

• Hana Krýsová,
• Michael Neumann-Spallart,
• Hana Tarábková,
• Pavel Janda,
• Ladislav Kavan and
• Josef Krýsa

Beilstein J. Nanotechnol. 2021, 12, 24–34, doi:10.3762/bjnano.12.2

• the topic of the present work, in which atomic layer deposition (ALD) is used as the coating technique [1]. This method is a gas-phase process which relies on a molecular approach. Therefore, a conformal coating, which reaches the pores and crevasses of the sample, can be obtained. Protective coating

• on its surface (Figure S6, Supporting Information File 1), the surface of an FTO substrate covered by a thin conformal Al2O3 film does not show any significant morphological changes after the electrochemical treatment (Figure S7, Supporting Information File 1). The cathodic breakdown of FTO is also

Atomic layer deposition for efficient oxygen evolution reaction at Pt/Ir catalyst layers

• Stefanie Schlicht,
• Korcan Percin,
• Stefanie Kriescher,
• André Hofer,
• Claudia Weidlich,
• Matthias Wessling and
• Julien Bachmann

Beilstein J. Nanotechnol. 2020, 11, 952–959, doi:10.3762/bjnano.11.79

• attractive thin film technique that allows for a conformal coating of not only planar substrates but also of highly porous ones [12][19][20][25]. This method is based on well-defined self-limiting surface reactions combined to deposit thin layers with highly uniform thickness. At least two precursors

Integrated photonics multi-waveguide devices for optical trapping and Raman spectroscopy: design, fabrication and performance demonstration

• Gyllion B. Loozen,
• Arnica Karuna,
• Mohammad M. R. Fanood,
• Erik Schreuder and
• Jacob Caro

Beilstein J. Nanotechnol. 2020, 11, 829–842, doi:10.3762/bjnano.11.68

• layers does not reflect the real situation. The surface topography resulting from the conformal deposition on the etched structures has been omitted in the cross sections. (a) Optical microscope image of a device with 16 excitation and 4 detection waveguides. (b) Magnification of the marked area in (a

Growth of lithium hydride thin films from solutions: Towards solution atomic layer deposition of lithiated films

• Ivan Kundrata,
• Karol Fröhlich,
• Lubomír Vančo,
• Matej Mičušík and
• Julien Bachmann

Beilstein J. Nanotechnol. 2019, 10, 1443–1451, doi:10.3762/bjnano.10.142

• deposition (ALD) avoids these issues and is able to deposit conformal films on 3D substrates. However, ALD is limited in the range of chemical reactions, due to the required volatility of the precursors. Moreover, relatively high temperatures are necessary (above 100 °C), which can be detrimental to

• addressed for more general applicability. To meet this challenge, the use of atomic layer deposition (ALD) has been proposed [2][3]. The inherent conformity of ALD indeed allows for thinner, conformal, pin-hole free films [4][5]. ALD has been instrumental in enabling the development of nanobatteries

• , LiH is not only suitable as an electrode material, where in fact it boasts the highest lithium concentration after elemental Li, it is also extremely useful as a hydrogen-torage layer. Since sputtering of LiH is possible [23][24], but not conformal, the sALD growth of LiH enables research regarding

In situ AFM visualization of Li–O₂ battery discharge products during redox cycling in an atmospherically controlled sample cell

• Kumar Virwani,
• Younes Ansari,
• Khanh Nguyen,
• Francisco José Alía Moreno-Ortiz,
• Jangwoo Kim,
• Maxwell J. Giammona,
• Ho-Cheol Kim and
• Young-Hye La

Beilstein J. Nanotechnol. 2019, 10, 930–940, doi:10.3762/bjnano.10.94

• electrochemical reactions can be effectively monitored using this technique. The electrochemical deposits at 350 nA discharge current grew conformal to the surface of glassy carbon, which is in contrast with a previous report [41]. The origins of such conformal growth are under further investigation. Conclusion A

Tungsten disulfide-based nanocomposites for photothermal therapy

• Tzuriel Levin,
• Hagit Sade,
• Rina Ben-Shabbat Binyamini,
• Maayan Pour,
• Iftach Nachman and
• Jean-Paul Lellouche

Beilstein J. Nanotechnol. 2019, 10, 811–822, doi:10.3762/bjnano.10.81

• nanoparticles. The preparation procedures are facile and make use of readily available reagents and equipment. Electron microscopy, FTIR, zeta potential, TGA, and ICP analyses demonstrated the attachment of CAN-mag nanoparticles to the nanotubes. CAN-mag attachment around the nanotubes was not conformal, and in

On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

• Alberto Perrotta,
• Julian Pilz,
• Stefan Pachmajer,
• Antonella Milella and
• Anna Maria Coclite

Beilstein J. Nanotechnol. 2019, 10, 746–759, doi:10.3762/bjnano.10.74

• methods for the production of (ultra-)thin inorganic and organic films [1][2]. The layer-by-layer nature of these methods allows for the deposition of highly conformal thin films with sub-nanometer thickness control, making them the techniques of choice for complex high aspect ratio nanostructured

Nanocomposite–parylene C thin films with high dielectric constant and low losses for future organic electronic devices

• Marwa Mokni,
• Gianluigi Maggioni,
• Abdelkader Kahouli,
• Sara M. Carturan,
• Walter Raniero and
• Alain Sylvestre

Beilstein J. Nanotechnol. 2019, 10, 428–441, doi:10.3762/bjnano.10.42

• organic field-effect transistors (OFETs) [11], organic light-emitting diodes (OLEDs) [12][13], and flexible organic electronic devices (FEDs) [14][15]. It presents an easy deposition process at low temperatures with a conformal and uniform layer [16]. Parylene C is a well-controlled material when used as

Integration of LaMnO_3+δ films on platinized silicon substrates for resistive switching applications by PI-MOCVD

• Raquel Rodriguez-Lamas,
• Dolors Pla,
• Odette Chaix-Pluchery,
• Benjamin Meunier,
• Fabrice Wilhelm,
• Andrei Rogalev,
• Laetitia Rapenne,
• Xavier Mescot,
• Quentin Rafhay,
• Hervé Roussel,
• Michel Boudard,
• Carmen Jiménez and
• Mónica Burriel

Beilstein J. Nanotechnol. 2019, 10, 389–398, doi:10.3762/bjnano.10.38

• -MOCVD) technique, as it allows for a controlled growth of the perovskite phase over large areas (at wafer level) with high film uniformity and conformal coverage using liquid precursors at room temperature and under an inert atmosphere [11][12]. Both conventional MOCVD [13][14][15] and PI-MOCVD [16][17

Bidirectional biomimetic flow sensing with antiparallel and curved artificial hair sensors

• Claudio Abels,
• Antonio Qualtieri,
• Toni Lober,
• Alessandro Mariotti,
• Lily D. Chambers,
• Massimo De Vittorio,
• William M. Megill and
• Francesco Rizzi

Beilstein J. Nanotechnol. 2019, 10, 32–46, doi:10.3762/bjnano.10.4

• bends out of the plane upon release [37]. The resulting cantilever thickness is 2.3 μm. MEMS packaging: After wire bonding the contact pads to an integrated circuit socket adapter (W13028RC, Winslow ADAPTICs), chemical vapour deposition of parylene at room temperature is performed which adds a conformal

Intrinsic ultrasmall nanoscale silicon turns n-/p-type with SiO₂/Si₃N₄-coating

• Dirk König,
• Daniel Hiller,
• Noël Wilck,
• Birger Berghoff,
• Merlin Müller,
• Sangeeta Thakur,
• Giovanni Di Santo,
• Luca Petaccia,
• Joachim Mayer,
• Sean Smith and
• Joachim Knoch

Beilstein J. Nanotechnol. 2018, 9, 2255–2264, doi:10.3762/bjnano.9.210

• each Buettiker probe is zero. The electrostatics within the gate underlap region has been taken into consideration with a conformal mapping technique that maps the underlap region to a parallel-plate capacitor and allows the extraction of a space-dependent effective oxide thickness that is used in this

Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates

• Noel Kennedy,
• Ray Duffy,
• Luke Eaton,
• Dan O’Connell,
• Scott Monaghan,
• Shane Garvey,
• James Connolly,
• Chris Hatem,
• Justin D. Holmes and
• Brenda Long

Beilstein J. Nanotechnol. 2018, 9, 2106–2113, doi:10.3762/bjnano.9.199

• future device scaling that a means of damage-free, conformal doping is established, and this is where monolayer doping (MLD) appears to have potential to succeed. MLD was pioneered by Javey and co-workers [5] in 2008 and has subsequently been used to dope multiple substrate types such as silicon [5][6][7

Wafer-scale bioactive substrate patterning by chemical lift-off lithography

• Chong-You Chen,
• Chang-Ming Wang,
• Hsiang-Hua Li,
• Hong-Hseng Chan and
• Wei-Ssu Liao

Beilstein J. Nanotechnol. 2018, 9, 311–320, doi:10.3762/bjnano.9.31

• create distinct regions carrying dissimilar surface properties for a variety of applications [21]. With conformal contact-induced reactions, the top layer Au–Au bond breakage on an alkanethiol SAM covered Au substrate leads to the exposure of fresh Au toward the exterior environment. These vacancies can

• steps, and biomolecule anchoring. It should be noted that the conformal contact reaction requires no external pressure, and the lift-off operation is performed under ambient conditions. As shown in the AFM images of Figure 1, the SAM-modified Au surface reveals a depressed square pattern after CLL

Al₂O₃/TiO₂ inverse opals from electrosprayed self-assembled templates

• Arnau Coll,
• Sandra Bermejo,
• David Hernández and
• Luís Castañer

Beilstein J. Nanotechnol. 2018, 9, 216–223, doi:10.3762/bjnano.9.23

• clarity. The electrospray process of a nanofluid containing polystyrene nanospheres is described in the Experimental section below. The second step, shown in Figure 1b, consists of the deposition of a thin, conformal layer of Al2O3 in an ALD reactor at 80 °C. Such a low deposition temperature preserves

• process is the deposition of a conformal ALD layer of TiO2. Titania conformally covers the alumina layer as shown in Figure 1d. At this point, the structure is an inverse opal of a composite Al2O3/TiO2 layer with air voids. The result of the first fabrication step is shown in Figure 2 where up to 50

• temperature of the reactor is 80 °C, which avoids any possible damage to the polystyrene structures. The whole process produces a 20 nm conformal alumina layer. At this point of the process, the sample is an ordered layer of 360 nm polystyrene nanoparticles covered by a 20 nm thin layer of Al2O3. In the third

Atomic layer deposition and properties of ZrO₂/Fe₂O₃ thin films

• Kristjan Kalam,
• Helina Seemen,
• Peeter Ritslaid,
• Mihkel Rähn,
• Aile Tamm,
• Kaupo Kukli,
• Aarne Kasikov,
• Joosep Link,
• Raivo Stern,
• Salvador Dueñas,
• Helena Castán and
• Héctor García

Beilstein J. Nanotechnol. 2018, 9, 119–128, doi:10.3762/bjnano.9.14

• deposited on TiN substrates were supplied with platinum electrodes, with an area of 0.204 mm2, that were electron-beam-evaporated on top of the films. In addition, for investigating deposition uniformity in terms of conformal growth, stacked three-dimensional structures of silicon substrates with an aspect

Comparative study of post-growth annealing of Cu(hfac)₂, Co₂(CO)₈ and Me₂Au(acac) metal precursors deposited by FEBID

• Marcos V. Puydinger dos Santos,
• Aleksandra Szkudlarek,
• Artur Rydosz,
• Carlos Guerra-Nuñez,
• Fanny Béron,
• Kleber R. Pirota,
• Stanislav Moshkalev,
• José Alexandre Diniz and
• Ivo Utke

Beilstein J. Nanotechnol. 2018, 9, 91–101, doi:10.3762/bjnano.9.11

• yields a conformal percolated metallic film (Figure 1a). On the other hand (see Figure 1b), for Cu–C deposits the annealing at 1000 °C leads to the formation of SEM-visible Cu agglomerations. As the temperature increases up to 300 °C, the agglomerates continue to grow reaching an average size twice as

Synthesis of [{AgO₂CCH₂OMe(PPh₃)}_n] and theoretical study of its use in focused electron beam induced deposition

• Jelena Tamuliene,
• Julian Noll,
• Peter Frenzel,
• Tobias Rüffer,
• Alexander Jakob,
• Bernhard Walfort and
• Heinrich Lang

Beilstein J. Nanotechnol. 2017, 8, 2615–2624, doi:10.3762/bjnano.8.262

• was shown that coordination compounds, for example, silver(I) carboxylates can successfully be applied as single-source species for silver nanoparticle formation [6] and as gas-phase precursors in the deposition of pure, dense and conformal thin silver films [7][8][9]. This study aims for showing if