Focused particle beam-induced processing

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Editors: Prof. Michael Huth, Goethe Universität Frankfurt am Main, and Prof. Armin Gölzhäuser, Universität Bielefeld
 
In light of the success of 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, an analogous approach exists on the nanometer scale. With the aid of focused particle beam-induced deposition (FPBID) it is possible to create solid-state structures on the nanoscale. However, in contrast with large-scale 3D printing of plastic or metallic structures, FPBID provides nanomaterials with a wealth of interesting electronic, optical and magnetic properties. Due to this, focused electron beam-induced deposition (FEBID) has experienced a rapid expansion in the breadth of its application fields over the last 10 years. A more recent development that may help to alleviate the resolution-limiting issues in FEBID on solid substrates is the employment of helium ion microscopy. In its current development stage, it is mainly used for imaging applications, providing enhanced contrast for surface features as compared to scanning electron microscopy.
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Focused particle beam-induced processing

  • Michael Huth and
  • Armin Gölzhäuser

Beilstein J. Nanotechnol. 2015, 6, 1883–1885, doi:10.3762/bjnano.6.191

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Published 09 Sep 2015

Channeling in helium ion microscopy: Mapping of crystal orientation

  • Vasilisa Veligura,
  • Gregor Hlawacek,
  • Raoul van Gastel,
  • Harold J. W. Zandvliet and
  • Bene Poelsema

Beilstein J. Nanotechnol. 2012, 3, 501–506, doi:10.3762/bjnano.3.57

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Published 10 Jul 2012

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

  • Gregor Hlawacek,
  • Vasilisa Veligura,
  • Stefan Lorbek,
  • Tijs F. Mocking,
  • Antony George,
  • Raoul van Gastel,
  • Harold J. W. Zandvliet and
  • Bene Poelsema

Beilstein J. Nanotechnol. 2012, 3, 507–512, doi:10.3762/bjnano.3.58

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Published 12 Jul 2012

Nano-structuring, surface and bulk modification with a focused helium ion beam

  • Daniel Fox,
  • Yanhui Chen,
  • Colm C. Faulkner and
  • Hongzhou Zhang

Beilstein J. Nanotechnol. 2012, 3, 579–585, doi:10.3762/bjnano.3.67

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Published 08 Aug 2012

Digging gold: keV He+ ion interaction with Au

  • Vasilisa Veligura,
  • Gregor Hlawacek,
  • Robin P. Berkelaar,
  • Raoul van Gastel,
  • Harold J. W. Zandvliet and
  • Bene Poelsema

Beilstein J. Nanotechnol. 2013, 4, 453–460, doi:10.3762/bjnano.4.53

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Published 24 Jul 2013

Fabrication of carbon nanomembranes by helium ion beam lithography

  • Xianghui Zhang,
  • Henning Vieker,
  • André Beyer and
  • Armin Gölzhäuser

Beilstein J. Nanotechnol. 2014, 5, 188–194, doi:10.3762/bjnano.5.20

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Published 21 Feb 2014

Fundamental edge broadening effects during focused electron beam induced nanosynthesis

  • Roland Schmied,
  • Jason D. Fowlkes,
  • Robert Winkler,
  • Phillip D. Rack and
  • Harald Plank

Beilstein J. Nanotechnol. 2015, 6, 462–471, doi:10.3762/bjnano.6.47

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Published 16 Feb 2015

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

  • Brett B. Lewis,
  • Michael G. Stanford,
  • Jason D. Fowlkes,
  • Kevin Lester,
  • Harald Plank and
  • Philip D. Rack

Beilstein J. Nanotechnol. 2015, 6, 907–918, doi:10.3762/bjnano.6.94

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Published 08 Apr 2015

Patterning technique for gold nanoparticles on substrates using a focused electron beam

  • Takahiro Noriki,
  • Shogo Abe,
  • Kotaro Kajikawa and
  • Masayuki Shimojo

Beilstein J. Nanotechnol. 2015, 6, 1010–1015, doi:10.3762/bjnano.6.104

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Published 22 Apr 2015

Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures

  • Oleksandr V. Dobrovolskiy,
  • Maksym Kompaniiets,
  • Roland Sachser,
  • Fabrizio Porrati,
  • Christian Gspan,
  • Harald Plank and
  • Michael Huth

Beilstein J. Nanotechnol. 2015, 6, 1082–1090, doi:10.3762/bjnano.6.109

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Published 29 Apr 2015

Scanning reflection ion microscopy in a helium ion microscope

  • Yuri V. Petrov and
  • Oleg F. Vyvenko

Beilstein J. Nanotechnol. 2015, 6, 1125–1137, doi:10.3762/bjnano.6.114

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Published 07 May 2015

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

  • Francesc Salvat-Pujol,
  • Roser Valentí and
  • Wolfgang S. Werner

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

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Published 03 Jun 2015

Structural transitions in electron beam deposited Co–carbonyl suspended nanowires at high electrical current densities

  • Gian Carlo Gazzadi and
  • Stefano Frabboni

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

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Published 11 Jun 2015

Influence of the shape and surface oxidation in the magnetization reversal of thin iron nanowires grown by focused electron beam induced deposition

  • Luis A. Rodríguez,
  • Lorenz Deen,
  • Rosa Córdoba,
  • César Magén,
  • Etienne Snoeck,
  • Bert Koopmans and
  • José M. De Teresa

Beilstein J. Nanotechnol. 2015, 6, 1319–1331, doi:10.3762/bjnano.6.136

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Published 15 Jun 2015

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

  • Aleksandra Szkudlarek,
  • Alfredo Rodrigues Vaz,
  • Yucheng Zhang,
  • Andrzej Rudkowski,
  • Czesław Kapusta,
  • Rolf Erni,
  • Stanislav Moshkalev and
  • Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1508–1517, doi:10.3762/bjnano.6.156

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Published 13 Jul 2015

Continuum models of focused electron beam induced processing

  • Milos Toth,
  • Charlene Lobo,
  • Vinzenz Friedli,
  • Aleksandra Szkudlarek and
  • Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1518–1540, doi:10.3762/bjnano.6.157

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Published 14 Jul 2015

Imaging of carbon nanomembranes with helium ion microscopy

  • André Beyer,
  • Henning Vieker,
  • Robin Klett,
  • Hanno Meyer zu Theenhausen,
  • Polina Angelova and
  • Armin Gölzhäuser

Beilstein J. Nanotechnol. 2015, 6, 1712–1720, doi:10.3762/bjnano.6.175

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Published 12 Aug 2015

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

  • Rachel M. Thorman,
  • Ragesh Kumar T. P.,
  • D. Howard Fairbrother and
  • Oddur Ingólfsson

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

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Published 16 Sep 2015

Correction: Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

  • Aleksandra Szkudlarek,
  • Alfredo Rodrigues Vaz,
  • Yucheng Zhang,
  • Andrzej Rudkowski,
  • Czesław Kapusta,
  • Rolf Erni,
  • Stanislav Moshkalev and
  • Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1935–1936, doi:10.3762/bjnano.6.196

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Published 21 Sep 2015
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