Focused particle beam-induced processing

  1. editorImage
  1. Editors: Prof. Michael Huth, Goethe Universität Frankfurt am Main, and Prof. Armin Gölzhäuser, Universität Bielefeld

In light of the success of 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, an analogous approach exists on the nanometer scale. With the aid of focused particle beam-induced deposition (FPBID) it is possible to create solid-state structures on the nanoscale. However, in contrast with large-scale 3D printing of plastic or metallic structures, FPBID provides nanomaterials with a wealth of interesting electronic, optical and magnetic properties. Due to this, focused electron beam-induced deposition (FEBID) has experienced a rapid expansion in the breadth of its application fields over the last 10 years. A more recent development that may help to alleviate the resolution-limiting issues in FEBID on solid substrates is the employment of helium ion microscopy. In its current development stage, it is mainly used for imaging applications, providing enhanced contrast for surface features as compared to scanning electron microscopy.

Focused particle beam-induced processing

  1. Michael Huth and
  2. Armin Gölzhäuser
  • Editorial
  • Published 09 Sep 2015

Beilstein J. Nanotechnol. 2015, 6, 1883–1885, doi:10.3762/bjnano.6.191

Channeling in helium ion microscopy: Mapping of crystal orientation

  1. Vasilisa Veligura,
  2. Gregor Hlawacek,
  3. Raoul van Gastel,
  4. Harold J. W. Zandvliet and
  5. Bene Poelsema
  • Full Research Paper
  • Published 10 Jul 2012

  • PDF

Beilstein J. Nanotechnol. 2012, 3, 501–506, doi:10.3762/bjnano.3.57

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

  1. Gregor Hlawacek,
  2. Vasilisa Veligura,
  3. Stefan Lorbek,
  4. Tijs F. Mocking,
  5. Antony George,
  6. Raoul van Gastel,
  7. Harold J. W. Zandvliet and
  8. Bene Poelsema
  • Full Research Paper
  • Published 12 Jul 2012

  • PDF

Beilstein J. Nanotechnol. 2012, 3, 507–512, doi:10.3762/bjnano.3.58

Nano-structuring, surface and bulk modification with a focused helium ion beam

  1. Daniel Fox,
  2. Yanhui Chen,
  3. Colm C. Faulkner and
  4. Hongzhou Zhang
  • Full Research Paper
  • Published 08 Aug 2012

  • PDF

  • Supp. Info

Beilstein J. Nanotechnol. 2012, 3, 579–585, doi:10.3762/bjnano.3.67

Digging gold: keV He+ ion interaction with Au

  1. Vasilisa Veligura,
  2. Gregor Hlawacek,
  3. Robin P. Berkelaar,
  4. Raoul van Gastel,
  5. Harold J. W. Zandvliet and
  6. Bene Poelsema
  • Full Research Paper
  • Published 24 Jul 2013

  • PDF

Beilstein J. Nanotechnol. 2013, 4, 453–460, doi:10.3762/bjnano.4.53

Fabrication of carbon nanomembranes by helium ion beam lithography

  1. Xianghui Zhang,
  2. Henning Vieker,
  3. André Beyer and
  4. Armin Gölzhäuser
  • Full Research Paper
  • Published 21 Feb 2014

  • PDF

Beilstein J. Nanotechnol. 2014, 5, 188–194, doi:10.3762/bjnano.5.20

Fundamental edge broadening effects during focused electron beam induced nanosynthesis

  1. Roland Schmied,
  2. Jason D. Fowlkes,
  3. Robert Winkler,
  4. Phillip D. Rack and
  5. Harald Plank
  • Full Research Paper
  • Published 16 Feb 2015

  • PDF

  • Supp. Info

Beilstein J. Nanotechnol. 2015, 6, 462–471, doi:10.3762/bjnano.6.47

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

  1. Brett B. Lewis,
  2. Michael G. Stanford,
  3. Jason D. Fowlkes,
  4. Kevin Lester,
  5. Harald Plank and
  6. Philip D. Rack
  • Full Research Paper
  • Published 08 Apr 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 907–918, doi:10.3762/bjnano.6.94

Patterning technique for gold nanoparticles on substrates using a focused electron beam

  1. Takahiro Noriki,
  2. Shogo Abe,
  3. Kotaro Kajikawa and
  4. Masayuki Shimojo
  • Full Research Paper
  • Published 22 Apr 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1010–1015, doi:10.3762/bjnano.6.104

Tunable magnetism on the lateral mesoscale by post-processing of Co/Pt heterostructures

  1. Oleksandr V. Dobrovolskiy,
  2. Maksym Kompaniiets,
  3. Roland Sachser,
  4. Fabrizio Porrati,
  5. Christian Gspan,
  6. Harald Plank and
  7. Michael Huth
  • Full Research Paper
  • Published 29 Apr 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1082–1090, doi:10.3762/bjnano.6.109

  • Full Research Paper
  • Published 07 May 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1125–1137, doi:10.3762/bjnano.6.114

  • Review
  • Published 03 Jun 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1260–1267, doi:10.3762/bjnano.6.129

  • Full Research Paper
  • Published 11 Jun 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1298–1305, doi:10.3762/bjnano.6.134

Influence of the shape and surface oxidation in the magnetization reversal of thin iron nanowires grown by focused electron beam induced deposition

  1. Luis A. Rodríguez,
  2. Lorenz Deen,
  3. Rosa Córdoba,
  4. César Magén,
  5. Etienne Snoeck,
  6. Bert Koopmans and
  7. José M. De Teresa
  • Full Research Paper
  • Published 15 Jun 2015

  • PDF

  • Supp. Info

Beilstein J. Nanotechnol. 2015, 6, 1319–1331, doi:10.3762/bjnano.6.136

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

  1. Aleksandra Szkudlarek,
  2. Alfredo Rodrigues Vaz,
  3. Yucheng Zhang,
  4. Andrzej Rudkowski,
  5. Czesław Kapusta,
  6. Rolf Erni,
  7. Stanislav Moshkalev and
  8. Ivo Utke
  • Full Research Paper
  • Published 13 Jul 2015

  • PDF

  • Supp. Info

  • Correction

Beilstein J. Nanotechnol. 2015, 6, 1508–1517, doi:10.3762/bjnano.6.156

Continuum models of focused electron beam induced processing

  1. Milos Toth,
  2. Charlene Lobo,
  3. Vinzenz Friedli,
  4. Aleksandra Szkudlarek and
  5. Ivo Utke
  • Review
  • Published 14 Jul 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1518–1540, doi:10.3762/bjnano.6.157

Imaging of carbon nanomembranes with helium ion microscopy

  1. André Beyer,
  2. Henning Vieker,
  3. Robin Klett,
  4. Hanno Meyer zu Theenhausen,
  5. Polina Angelova and
  6. Armin Gölzhäuser
  • Full Research Paper
  • Published 12 Aug 2015

  • PDF

  • Supp. Info

Beilstein J. Nanotechnol. 2015, 6, 1712–1720, doi:10.3762/bjnano.6.175

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

  1. Rachel M. Thorman,
  2. Ragesh Kumar T. P.,
  3. D. Howard Fairbrother and
  4. Oddur Ingólfsson
  • Review
  • Published 16 Sep 2015

  • PDF

Beilstein J. Nanotechnol. 2015, 6, 1904–1926, doi:10.3762/bjnano.6.194

Correction: Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

  1. Aleksandra Szkudlarek,
  2. Alfredo Rodrigues Vaz,
  3. Yucheng Zhang,
  4. Andrzej Rudkowski,
  5. Czesław Kapusta,
  6. Rolf Erni,
  7. Stanislav Moshkalev and
  8. Ivo Utke
  • Correction
  • Published 21 Sep 2015

Beilstein J. Nanotechnol. 2015, 6, 1935–1936, doi:10.3762/bjnano.6.196

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