Sputtering of silicon nanopowders by an argon cluster ion beam

Xiaomei Zeng, Vasiliy Pelenovich, Zhenguo Wang, Wenbin Zuo, Sergey Belykh, Alexander Tolstogouzov, Dejun Fu and Xiangheng Xiao
Beilstein J. Nanotechnol. 2019, 10, 135–143. https://doi.org/10.3762/bjnano.10.13

Cite the Following Article

Sputtering of silicon nanopowders by an argon cluster ion beam
Xiaomei Zeng, Vasiliy Pelenovich, Zhenguo Wang, Wenbin Zuo, Sergey Belykh, Alexander Tolstogouzov, Dejun Fu and Xiangheng Xiao
Beilstein J. Nanotechnol. 2019, 10, 135–143. https://doi.org/10.3762/bjnano.10.13

How to Cite

Zeng, X.; Pelenovich, V.; Wang, Z.; Zuo, W.; Belykh, S.; Tolstogouzov, A.; Fu, D.; Xiao, X. Beilstein J. Nanotechnol. 2019, 10, 135–143. doi:10.3762/bjnano.10.13

Download Citation

Citation data can be downloaded as file using the "Download" button or used for copy/paste from the text window below.
Citation data in RIS format can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Zotero.

Presentation Graphic

Picture with graphical abstract, title and authors for social media postings and presentations.
Format: PNG Size: 354.9 KB Download

Citations to This Article

Up to 20 of the most recent references are displayed here.

Scholarly Works

  • Nazarov, A. V.; Zavilgelskiy, A. D.; Ieshkin, A. E.; Kireev, D. S.; Shemukhin, A. A.; Chernysh, V. S.; Nordlund, K.; Djurabekova, F. On the angular distributions of atoms sputtered by gas cluster ion beam. Vacuum 2023, 212, 112061. doi:10.1016/j.vacuum.2023.112061
  • Skryleva, E. A.; Senatulin, B. R.; Kiselev, D. A.; Ilina, T. S.; Podgorny, D.; Parkhomenko, Y. N. Ar gas cluster ion beam assisted XPS study of LiNbO3 Z cut surface. Surfaces and Interfaces 2021, 26, 101428. doi:10.1016/j.surfin.2021.101428
  • Xiao, H.; Dai, Y.; Duan, J.-A.; Tian, Y.; Li, J. Material removal and surface evolution of single crystal silicon during ion beam polishing. Applied Surface Science 2021, 544, 148954. doi:10.1016/j.apsusc.2021.148954
  • Jin-Bao, L.; Pelenovich, V. O.; Xiao-Mei, Z.; Zhong-Hua, H.; Xiang-Yu, Z.; Wen-Bin, Z.; Dejun, F. Effect of ion dose ratio on multilevel energy smoothing model of gas cluster. Acta Physica Sinica 2021, 70, 223601-1–223601-7. doi:10.7498/aps.70.20202011
  • 武汉大学; 物理科学与技术学院, 武. Double-step gas cluster ion beam smoothing. Acta Physica Sinica 2021, 70, 0. doi:10.7498/aps.70.20201454
  • Pelenovich, V. O.; Zeng, X.; Zuo, W.; Tolstogouzov, A.; Korobeishchikov, N. G.; Fu, D.; Yang, B. Formation of irregular morphology on nanostructured surface by gas cluster ion beam. Vacuum 2020, 182, 109705. doi:10.1016/j.vacuum.2020.109705
  • Pelenovich, V. O.; Zeng, X.; Zuo, W.; Tolstogouzov, A.; Gololobov, G. P.; Suvorov, D. V.; Slivkin, E. V.; Hu, D.; Tian, C.; D, N.; Fu, D.; Yang, B. Enhanced sputtering yield of nanostructured samples under Ar+ cluster bombardment. Vacuum 2020, 172, 109096. doi:10.1016/j.vacuum.2019.109096
  • Xiao-Mei, Z.; Pelenovich, V. O.; Rakhimov, R.; Wen-Bin, Z.; Bin, X.; Jin-Bao, L.; Xiang-Yu, Z.; Dejun, F. Design and application of gas cluster accelerator for surface smoothing and nanostructures formation. Acta Physica Sinica 2020, 69, 093601-1–093601-10. doi:10.7498/aps.69.20191990
  • Stepanov, A. L.; Vorob’ev, V. V.; Rogov, A.; Nuzhdin, V. I.; Valeev, V. F. Sputtering of silicon surface by silver-ion implantation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2019, 457, 1–3. doi:10.1016/j.nimb.2019.07.020
Other Beilstein-Institut Open Science Activities