Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering

Petronela Prepelita, Ionel Stavarache, Doina Craciun, Florin Garoi, Catalin Negrila, Beatrice Gabriela Sbarcea and Valentin Craciun
Beilstein J. Nanotechnol. 2019, 10, 1511–1522. https://doi.org/10.3762/bjnano.10.149

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Rapid thermal annealing for high-quality ITO thin films deposited by radio-frequency magnetron sputtering
Petronela Prepelita, Ionel Stavarache, Doina Craciun, Florin Garoi, Catalin Negrila, Beatrice Gabriela Sbarcea and Valentin Craciun
Beilstein J. Nanotechnol. 2019, 10, 1511–1522. https://doi.org/10.3762/bjnano.10.149

How to Cite

Prepelita, P.; Stavarache, I.; Craciun, D.; Garoi, F.; Negrila, C.; Sbarcea, B. G.; Craciun, V. Beilstein J. Nanotechnol. 2019, 10, 1511–1522. doi:10.3762/bjnano.10.149

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