Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

Loïc Crouzier, Alexandra Delvallée, Sébastien Ducourtieux, Laurent Devoille, Guillaume Noircler, Christian Ulysse, Olivier Taché, Elodie Barruet, Christophe Tromas and Nicolas Feltin
Beilstein J. Nanotechnol. 2019, 10, 1523–1536. https://doi.org/10.3762/bjnano.10.150

Cite the Following Article

Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology
Loïc Crouzier, Alexandra Delvallée, Sébastien Ducourtieux, Laurent Devoille, Guillaume Noircler, Christian Ulysse, Olivier Taché, Elodie Barruet, Christophe Tromas and Nicolas Feltin
Beilstein J. Nanotechnol. 2019, 10, 1523–1536. https://doi.org/10.3762/bjnano.10.150

How to Cite

Crouzier, L.; Delvallée, A.; Ducourtieux, S.; Devoille, L.; Noircler, G.; Ulysse, C.; Taché, O.; Barruet, E.; Tromas, C.; Feltin, N. Beilstein J. Nanotechnol. 2019, 10, 1523–1536. doi:10.3762/bjnano.10.150

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