On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

Alberto Perrotta, Julian Pilz, Stefan Pachmajer, Antonella Milella and Anna Maria Coclite

Beilstein J. Nanotechnol. 2019, 10, 746–759. doi:10.3762/bjnano.10.74

Supporting Information

Supporting Information File 1: Details on the EP measurements, GIXD data recorded after annealing at 600 °C, saturation curves for the PE-ALD ZnO process optimized at room temperature, example of fitting of the HR XPS peak associated to O 1s.
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