Mapping of integrated PIN diodes with a 3D architecture by scanning microwave impedance microscopy and dynamic spectroscopy

Rosine Coq Germanicus, Peter De Wolf, Florent Lallemand, Catherine Bunel, Serge Bardy, Hugues Murray and Ulrike Lüders

Beilstein J. Nanotechnol. 2020, 11, 1764–1775. doi:10.3762/bjnano.11.159

Supporting Information

This supporting information file presents ∂C/∂V phase and sMIM-C results and analyses obtained for a staircase silicon sample.

Supporting Information File 1: Additional results of scanning microwave impedance microscopy and dynamic spectroscopy-based mapping of integrated PIN diodes.
Format: PDF Size: 560.2 KB Download

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