Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2

Aya Mahgoub, Hang Lu, Rachel M. Thorman, Konstantin Preradovic, Titel Jurca, Lisa McElwee-White, Howard Fairbrother and Cornelis W. Hagen

Beilstein J. Nanotechnol. 2020, 11, 1789–1800. https://doi.org/10.3762/bjnano.11.161

Supporting Information

The file contains EDX spectra of deposits grown from all three precursors before and after plasma cleaning the SEM chamber, an EDX spectrum of the bare Si substrate and graphs of the diameters of pillars grown in experiments 1 and 2.

Supporting Information File 1: Additional experimental data.
Format: PDF Size: 541.0 KB Download

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