Influence of the epitaxial composition on N-face GaN KOH etch kinetics determined by ICP-OES

Markus Tautz, Maren T. Kuchenbrod, Joachim Hertkorn, Robert Weinberger, Martin Welzel, Arno Pfitzner and David Díaz Díaz
Beilstein J. Nanotechnol. 2020, 11, 41–50. https://doi.org/10.3762/bjnano.11.4

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Influence of the epitaxial composition on N-face GaN KOH etch kinetics determined by ICP-OES
Markus Tautz, Maren T. Kuchenbrod, Joachim Hertkorn, Robert Weinberger, Martin Welzel, Arno Pfitzner and David Díaz Díaz
Beilstein J. Nanotechnol. 2020, 11, 41–50. https://doi.org/10.3762/bjnano.11.4

How to Cite

Tautz, M.; Kuchenbrod, M. T.; Hertkorn, J.; Weinberger, R.; Welzel, M.; Pfitzner, A.; Díaz Díaz, D. Beilstein J. Nanotechnol. 2020, 11, 41–50. doi:10.3762/bjnano.11.4

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