New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures

Bartosz Pruchnik, Krzysztof Kwoka, Ewelina Gacka, Dominik Badura, Piotr Kunicki, Andrzej Sierakowski, Paweł Janus, Tomasz Piasecki and Teodor Gotszalk
Beilstein J. Nanotechnol. 2024, 15, 1273–1282. https://doi.org/10.3762/bjnano.15.103

Cite the Following Article

New design of operational MEMS bridges for measurements of properties of FEBID-based nanostructures
Bartosz Pruchnik, Krzysztof Kwoka, Ewelina Gacka, Dominik Badura, Piotr Kunicki, Andrzej Sierakowski, Paweł Janus, Tomasz Piasecki and Teodor Gotszalk
Beilstein J. Nanotechnol. 2024, 15, 1273–1282. https://doi.org/10.3762/bjnano.15.103

How to Cite

Pruchnik, B.; Kwoka, K.; Gacka, E.; Badura, D.; Kunicki, P.; Sierakowski, A.; Janus, P.; Piasecki, T.; Gotszalk, T. Beilstein J. Nanotechnol. 2024, 15, 1273–1282. doi:10.3762/bjnano.15.103

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  • Pruchnik, B.; Kwoka, K.; Masteghin, M. G. Precise control of bending and stiffness in MEMS cantilevers via focused ion beam-induced strain. Journal of Micromechanics and Microengineering 2026, 36, 55004. doi:10.1088/1361-6439/ae63db
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