Performance optimization of a microwave-coupled plasma-based ultralow-energy ECR ion source for silicon nanostructuring

Joy Mukherjee, Safiul Alam Mollick, Tanmoy Basu and Tapobrata Som

Beilstein J. Nanotechnol. 2025, 16, 484–494. https://doi.org/10.3762/bjnano.16.37

Cite the Following Article

Joy Mukherjee, Safiul Alam Mollick, Tanmoy Basu and Tapobrata Som

Beilstein J. Nanotechnol. 2025, 16, 484–494. https://doi.org/10.3762/bjnano.16.37

How to Cite

Mukherjee, J.; Mollick, S. A.; Basu, T.; Som, T. Beilstein J. Nanotechnol. 2025, 16, 484–494. doi:10.3762/bjnano.16.37

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aromatic aldehyde	the word “aromatic” OR “aldehyde”
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“aromatic aldehyde”	the exact phrase “aromatic aldehyde”
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