Ar+ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties

Manu Bura, Divya Gupta, Arun Kumar and Sanjeev Aggarwal
Beilstein J. Nanotechnol. 2025, 16, 872–886. https://doi.org/10.3762/bjnano.16.66

Cite the Following Article

Ar+ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties
Manu Bura, Divya Gupta, Arun Kumar and Sanjeev Aggarwal
Beilstein J. Nanotechnol. 2025, 16, 872–886. https://doi.org/10.3762/bjnano.16.66

How to Cite

Bura, M.; Gupta, D.; Kumar, A.; Aggarwal, S. Beilstein J. Nanotechnol. 2025, 16, 872–886. doi:10.3762/bjnano.16.66

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