Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring

Niina Halonen, Joni Kilpijärvi, Maciej Sobocinski, Timir Datta-Chaudhuri, Antti Hassinen, Someshekar B. Prakash, Peter Möller, Pamela Abshire, Sakari Kellokumpu and Anita Lloyd Spetz
Beilstein J. Nanotechnol. 2016, 7, 1871–1877. https://doi.org/10.3762/bjnano.7.179

Cite the Following Article

Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring
Niina Halonen, Joni Kilpijärvi, Maciej Sobocinski, Timir Datta-Chaudhuri, Antti Hassinen, Someshekar B. Prakash, Peter Möller, Pamela Abshire, Sakari Kellokumpu and Anita Lloyd Spetz
Beilstein J. Nanotechnol. 2016, 7, 1871–1877. https://doi.org/10.3762/bjnano.7.179

How to Cite

Halonen, N.; Kilpijärvi, J.; Sobocinski, M.; Datta-Chaudhuri, T.; Hassinen, A.; Prakash, S. B.; Möller, P.; Abshire, P.; Kellokumpu, S.; Lloyd Spetz, A. Beilstein J. Nanotechnol. 2016, 7, 1871–1877. doi:10.3762/bjnano.7.179

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