Beilstein J. Nanotechnol. 2018, 9, 1390–1398. https://doi.org/10.3762/bjnano.9.131
Supporting information features: parameters for the fabrication of the membranes, COMSOL simulations, approximation for the resistance of a membrane with conical nanopores, serial repair mechanism, real-time fluorescence microscopy, and XPS analysis of CHF3/CF4-etched sample surfaces before and after thermal annealing.
Supporting Information File 1: Additional experimental data. | ||
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