Supporting Information
Supporting information features: parameters for the fabrication of the membranes, COMSOL simulations, approximation for the resistance of a membrane with conical nanopores, serial repair mechanism, real-time fluorescence microscopy, and XPS analysis of CHF3/CF4-etched sample surfaces before and after thermal annealing.
| Supporting Information File 1: Additional experimental data. | ||
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Cite the Following Article
Nanoporous silicon nitride-based membranes of controlled pore size, shape and areal density: Fabrication as well as electrophoretic and molecular filtering characterization
Axel Seidenstücker, Stefan Beirle, Fabian Enderle, Paul Ziemann, Othmar Marti and Alfred Plettl
Beilstein J. Nanotechnol. 2018, 9, 1390–1398.
https://doi.org/10.3762/bjnano.9.131
How to Cite
Seidenstücker, A.; Beirle, S.; Enderle, F.; Ziemann, P.; Marti, O.; Plettl, A. Beilstein J. Nanotechnol. 2018, 9, 1390–1398. doi:10.3762/bjnano.9.131
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