Nanoporous silicon nitride-based membranes of controlled pore size, shape and areal density: Fabrication as well as electrophoretic and molecular filtering characterization

Axel Seidenstücker, Stefan Beirle, Fabian Enderle, Paul Ziemann, Othmar Marti and Alfred Plettl

Beilstein J. Nanotechnol. 2018, 9, 1390–1398. doi:10.3762/bjnano.9.131

Supporting Information

Supporting information features: parameters for the fabrication of the membranes, COMSOL simulations, approximation for the resistance of a membrane with conical nanopores, serial repair mechanism, real-time fluorescence microscopy, and XPS analysis of CHF3/CF4-etched sample surfaces before and after thermal annealing.

Supporting Information File 1: Additional experimental data.
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