Atomic layer deposition and properties of ZrO2/Fe2O3 thin films

Kristjan Kalam, Helina Seemen, Peeter Ritslaid, Mihkel Rähn, Aile Tamm, Kaupo Kukli, Aarne Kasikov, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán and Héctor García
Beilstein J. Nanotechnol. 2018, 9, 119–128. https://doi.org/10.3762/bjnano.9.14

Cite the Following Article

Atomic layer deposition and properties of ZrO2/Fe2O3 thin films
Kristjan Kalam, Helina Seemen, Peeter Ritslaid, Mihkel Rähn, Aile Tamm, Kaupo Kukli, Aarne Kasikov, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán and Héctor García
Beilstein J. Nanotechnol. 2018, 9, 119–128. https://doi.org/10.3762/bjnano.9.14

How to Cite

Kalam, K.; Seemen, H.; Ritslaid, P.; Rähn, M.; Tamm, A.; Kukli, K.; Kasikov, A.; Link, J.; Stern, R.; Dueñas, S.; Castán, H.; García, H. Beilstein J. Nanotechnol. 2018, 9, 119–128. doi:10.3762/bjnano.9.14

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