Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

Lukas Keller and Michael Huth

Beilstein J. Nanotechnol. 2018, 9, 2581–2598. doi:10.3762/bjnano.9.240

Supporting Information

Explains the input and output files of the pattern generator program in detail (see also Figure 1). The parameters of the settings file setf are defined. The structure of the geometry file geof and the generated pattern file are shown. The usage of the illustration file and the description file is demonstrated.

Supporting Information File 1: Supporting information.
Format: PDF Size: 192.4 KB Download

References

Article Citation
Download RIS (Reference Manager) Download BIB (BIBTEX)
Cited References
Download RIS (Reference Manager) Download BIB (BIBTEX)

Presentation Graphic

Picture with graphical abstract, title and authors for social media postings and presentations.

Format: PNG Size: 545.3 KB Download
Back To Article

Latest Articles

Multicomponent bionanocomposites based on clay nanoarchitectures for electrochemical devices

  1. Giulia Lo Dico,
  2. Bernd Wicklein,
  3. Lorenzo Lisuzzo,
  4. Giuseppe Lazzara,
  5. Pilar Aranda and
  6. Eduardo Ruiz-Hitzky
  • Full Research Paper
  • Published 25 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1303–1315, doi:10.3762/bjnano.10.129

Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping

  1. Lukas Grünewald,
  2. Dagmar Gerthsen and
  3. Simon Hettler
  • Full Research Paper
  • Published 25 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1290–1302, doi:10.3762/bjnano.10.128

On the relaxation time of interacting superparamagnetic nanoparticles and implications for magnetic fluid hyperthermia

  1. Andrei Kuncser,
  2. Nicusor Iacob and
  3. Victor E. Kuncser
  • Full Research Paper
  • Published 24 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1280–1289, doi:10.3762/bjnano.10.127

A silver-nanoparticle/cellulose-nanofiber composite as a highly effective substrate for surface-enhanced Raman spectroscopy

  1. Yongxin Lu,
  2. Yan Luo,
  3. Zehao Lin and
  4. Jianguo Huang
  • Full Research Paper
  • Published 24 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1270–1279, doi:10.3762/bjnano.10.126

Alloyed Pt3M (M = Co, Ni) nanoparticles supported on S- and N-doped carbon nanotubes for the oxygen reduction reaction

  1. Stéphane Louisia,
  2. Yohann R. J. Thomas,
  3. Pierre Lecante,
  4. Marie Heitzmann,
  5. M. Rosa Axet,
  6. Pierre-André Jacques and
  7. Philippe Serp
  • Full Research Paper
  • Published 21 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1251–1269, doi:10.3762/bjnano.10.125

Molecular attachment to a microscope tip: inelastic tunneling, Kondo screening, and thermopower

  1. Rouzhaji Tuerhong,
  2. Mauro Boero and
  3. Jean-Pierre Bucher
  • Full Research Paper
  • Published 19 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1243–1250, doi:10.3762/bjnano.10.124

Luminescence of Tb3Al5O12 phosphors co-doped with Ce3+/Gd3+ for white light-emitting diodes

  1. Yu-Guo Yang,
  2. Lei Wei,
  3. Jian-Hua Xu,
  4. Hua-Jian Yu,
  5. Yan-Yan Hu,
  6. Hua-Di Zhang,
  7. Xu-Ping Wang,
  8. Bing Liu,
  9. Cong Zhang and
  10. Qing-Gang Li
  • Full Research Paper
  • Published 14 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1237–1242, doi:10.3762/bjnano.10.123

Imaging the surface potential at the steps on the rutile TiO2(110) surface by Kelvin probe force microscopy

  1. Masato Miyazaki,
  2. Huan Fei Wen,
  3. Quanzhen Zhang,
  4. Yuuki Adachi,
  5. Jan Brndiar,
  6. Ivan Štich,
  7. Yan Jun Li and
  8. Yasuhiro Sugawara
  • Full Research Paper
  • Published 13 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1228–1236, doi:10.3762/bjnano.10.122

Playing with covalent triazine framework tiles for improved CO2 adsorption properties and catalytic performance

  1. Giulia Tuci,
  2. Andree Iemhoff,
  3. Housseinou Ba,
  4. Lapo Luconi,
  5. Andrea Rossin,
  6. Vasiliki Papaefthimiou,
  7. Regina Palkovits,
  8. Jens Artz,
  9. Cuong Pham-Huu and
  10. Giuliano Giambastiani
  • Full Research Paper
  • Published 12 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1217–1227, doi:10.3762/bjnano.10.121

Angle-dependent structural colors in a nanoscale-grating photonic crystal fabricated by reverse nanoimprint technology

  1. Xu Zheng,
  2. Qing Wang,
  3. Jinjin Luan,
  4. Yao Li,
  5. Ning Wang and
  6. Rui Zhang
  • Full Research Paper
  • Published 11 Jun 2019

Beilstein J. Nanotechnol. 2019, 10, 1211–1216, doi:10.3762/bjnano.10.120

Latest Articles

Latest Thematic Issues

Advanced atomic force microscopy II

Milica Todorovic, Mehmet Z. Baykara and Thilo Glatzel

2018 Call Show Issue

Low-dimensional materials and systems

Sumeet Walia and Jianzhen Ou

2018 Show Issue

Advanced hybrid nanomaterials

Andreas Taubert, Fabrice Leroux, Pierre Rabu and Verónica de Zea Bermudez

New Show Issue

Chemical thin coating methods for functional nanomaterials

Mariona Coll, Julien Bachmann and David C. Cameron

2018 Show Issue

Optically and electrically driven nanoantennas

Alfred J. Meixner, Dai Zhang and Monika Fleischer

2018 Show Issue

Nano- and microstructures for energy conversion: materials and devices

Martina Schmid and Harry Mönig

2018 Show Issue

Metrology and technology CAD for the sub-10 nm technology node

Pierre Eyben, Ray Duffy, Narciso Gambacorti and Enrico Napolitani

2018 Show Issue

Scanning probe microscopy for energy-related materials

Philippe Leclère, Rüdiger Berger, Benjamin Grévin and Yi Zhang

2018 Show Issue

Topological materials

Juan Jose Palacios, Elsa Prada and Alfredo Levy Yeyati

2018 Show Issue
Browse all Thematic Issues

Keep Informed

RSS Feed

Subscribe to our Latest Articles RSS Feed.

Subscribe

Follow the Beilstein-Institut

LinkedIn

Twitter: @BeilsteinInst