Effect of annealing treatments on CeO2 grown on TiN and Si substrates by atomic layer deposition

Silvia Vangelista, Rossella Piagge, Satu Ek and Alessio Lamperti
Beilstein J. Nanotechnol. 2018, 9, 890–899. https://doi.org/10.3762/bjnano.9.83

Cite the Following Article

Effect of annealing treatments on CeO2 grown on TiN and Si substrates by atomic layer deposition
Silvia Vangelista, Rossella Piagge, Satu Ek and Alessio Lamperti
Beilstein J. Nanotechnol. 2018, 9, 890–899. https://doi.org/10.3762/bjnano.9.83

How to Cite

Vangelista, S.; Piagge, R.; Ek, S.; Lamperti, A. Beilstein J. Nanotechnol. 2018, 9, 890–899. doi:10.3762/bjnano.9.83

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