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Beilstein J. Nanotechnol. 2026, 17, 922–934, doi:10.3762/bjnano.17.65
Figure 1: Schematic of the cross-sectional view of the half-irradiated films.
Figure 2: GIXRD pattern of (a) as-deposited (WC_RT) and (b) 700 °C annealed (S1) films in air ambient.
Figure 3: GIXRD patterns of WC films (S2) deposited at 600 K substrate temperatures.
Figure 4: Typical RBS spectra of S2 films.
Figure 5: RBS spectra of the S1 films – pristine (black; S1_N) and irradiated (red; S1_I) at fluence 1 × 1017...
Figure 6: RBS spectra of the W peak of the S1 films – pristine (black) and irradiated with 100 keV Kr+ ions a...
Figure 7: Simulated spectra of W peak (S1 films) using SIMNRA of Pristine (black) and 100 keV Kr+ ion irradia...
Figure 8: RBS spectra of WC films (S2). The black curve is for the pristine (S2_N) and the red curve is for t...
Figure 9: Variation in differential areal concentration with ion fluence for S1. The sputter rate is obtained...
Figure 10: GIXRD patterns of pristine and irradiated WC–WO3 nanocomposite films (S1) at different fluences. Th...
Figure 11: SEM images of (a) pristine and irradiated WC–WO3 nanocomposite films (S1) at different fluences: (b...