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1 article(s) from Bura, Manu

Ar⁺ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties

Manu Bura,
Divya Gupta,
Arun Kumar and
Sanjeev Aggarwal

Beilstein J. Nanotechnol. 2025, 16, 872–886, doi:10.3762/bjnano.16.66

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Figure 1: Cross-sectional FESEM images of pristine ZnO film. Here yellow arrow represents the thickness of gr...

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Figure 2: GXRD pattern of pristine and Ar⁺-implanted ZnO films at various fluences.

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Figure 3: Shift in peak position of the (002) peak centered at 34.23° for all samples. 34.41° is the Bragg an...

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Figure 4: Raman spectra of (a) pristine and Ar⁺-implanted ZnO films at various fluences of (b) 1 × 10¹⁵, (c) ...

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Figure 5: Number of zinc and oxygen vacancies created by the argon ion beam in the ZnO target calculated usin...

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Figure 6: Deconvolution of the A₁ (LO) Raman peak of ZnO films implanted at various fluences of (a) 1 × 10¹⁵,...

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Figure 7: 2D and 3D AFM images of pristine (a1, a2) and Ar⁺-implanted ZnO films at fluences 1 × 10¹⁵ (b1, b2)...

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Figure 8: FESEM images of pristine (a) and Ar⁺-implanted ZnO films at fluences of (b) 1 × 10¹⁵, (c) 5 × 10¹⁵,...

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Figure 9: Diffuse reflectance spectra of (a) pristine and Ar⁺-implanted ZnO films at various fluences, viz. (...

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Figure 10: Kubelka–Munk function F(R) related to (a) pristine and Ar⁺-implanted ZnO films at various fluences,...

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Figure 11: Tauc’s plot of (a) pristine and Ar⁺-implanted ZnO films at various fluences, viz. (b) 1 × 10¹⁵, (c)...

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Figure 12: Plot of ln(F(R)) versus E for (a) pristine and Ar⁺-implanted ZnO films at various fluences, viz. (b...

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Figure 13: Variation in optical bandgap and Urbach energy values of pristine and 30 keV Ar⁺-implanted ZnO film...

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Published 11 Jun 2025

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Ar+ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties

Ar⁺ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties