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Beilstein J. Nanotechnol. 2025, 16, 690–699, doi:10.3762/bjnano.16.53
Figure 1: Comparison of Ta 4f XPS peaks determined for different samples. (a) pN2 = 60 mTorr, (b) pN2 = 70 mT...
Figure 2: Ta 4f XPS spectra of samples deposited at (a) pN2 = 60 mTorr, T = 800 °C and (b) pN2 = 60 mTorr, T ...
Figure 3: XRD spectra of TaN thin films on MgO substrates for deposition temperatures of 650, 700, 750, and 8...
Figure 4: Lattice constant and interplanar spacing of TaN thin films deposited at different temperatures of 6...
Figure 5: Resistance of TaN films grown at pN2 = 90 mTorr as a function of the deposition temperature: (a) 65...
Figure 6: (a) SEM image of the cross section of a TaN thin film prepared with FIB. (b) TEM analysis of the la...
Figure 7: AFM image of the TaN film deposited at pN2 = 90 mTorr and T = 850 °C.