1 article(s) from Klimenko, Alexey
- Full Research Paper
- Published 16 Jun 2015
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Figure 1: SEM images of a six-cantilevers array (2 μm thickness) obtained through chemical photolithography: ...
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Figure 2: a) Frequency responses of Si rectangular cantilever (2 μm thick, 100 μm long and 30 μm wide) in the...
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Figure 3: Frequency responses of AAO rectangular cantilever (2 μm thick, 800 μm long and 100 μm wide) at rela...
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Figure 4: Resonance frequency of the AAO cantilevers (2 μm thick, 800 μm long and 100 μm wide) as function of...
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Figure 5: Photomask (1); cantilever arrays as formed on Al-foil (2); free-standing anodic alumina cantilevers...
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Figure 6: Scheme of measurement cell in atomic force microscope with an integrated optical read-out.
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Figure 7: Spectrum of lateral (in-plane) modes corresponding to an alumina cantilever 2 μm thick, 800 μm long...
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