1 article(s) from Meyer, Fabian
- Full Research Paper
- Published 18 Nov 2020
-
PDF -
Album-
![]()
Figure 1: Comparison of the spot size (imaging resolution) as a function of the ion beam current for differen...
-
![]()
Figure 2: Mass spectrum of a Ga33Bi57Li10 LMAIS at an acceleration potential of 10 kV scanned by the ExB volt...
-
![]()
Figure 3: Examples using different ions: a) 30 keV He+, field of view (FOV): 1.5 × 1.5 µm2, trench width: 4 n...
-
![]()
Figure 4: Summary of the imaging resolution (80/20), experimentally achieved trench width, and simulated mini...
-
![]()
Figure 5: SRIM simulation [39] of the sputter profile from a 30 keV point-like beam in a gold substrate as a func...
-
![]()
Figure 6: Comparison of the normalized ion beam profiles (normalized half profiles = beam radius) obtained fr...
-
