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Beilstein J. Nanotechnol. 2013, 4, 690–698, doi:10.3762/bjnano.4.78
Figure 1: a) SEM images of a cross section of ZnO ALD films deposited on Si substrates by 200, 500, and 1000 ...
Figure 2: a) AFM images of the size of 3 × 3 μm2 of ZnO thin films deposited by 100, 200, 500 and 1000 cycles...
Figure 3: a) Transmittance spectra, b) band gap estimation, and c) band gap and Urbach energies of ZnO ALD fi...
Figure 4: PL and absorption spectra of 25 (a), 49.8 (b), 124 (c), and 250 nm (d) thick ZnO ALD films.
Figure 5: UV–vis intensity ratio of ZnO ALD films of different thickness.