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1 article(s) from Neuenschwander, Matthias

Integration of sharp silicon nitride tips into high-speed SU8 cantilevers in a batch fabrication process

Nahid Hosseini,
Matthias Neuenschwander,
Oliver Peric,
Santiago H. Andany,
Jonathan D. Adams and
Georg E. Fantner

Full Research Paper
Published 29 Nov 2019

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1. Figure 1: Batch fabrication process of LSNT-tip SU8 cantilevers. (a) Summarized process flow. (b) SEM image o...
  
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2. Figure 2: Tip sharpness and durability assessment of the LSNT-tip SU8 cantilevers using a polycrystalline tit...
  
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3. Figure 3: Comparison of the tapping bandwidth between our tip-integrated SU8 cantilever and a commercial sili...
  
  Jump to Figure 3

Beilstein J. Nanotechnol. 2019, 10, 2357–2363, doi:10.3762/bjnano.10.226

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