1 article(s) from Pilz, Wolfgang

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

  1. Nico Klingner,
  2. Gregor Hlawacek,
  3. Paul Mazarov,
  4. Wolfgang Pilz,
  5. Fabian Meyer and
  6. Lothar Bischoff
  • Full Research Paper
  • Published 18 Nov 2020

  • PDF
Graphical Abstract

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

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