2 article(s) from Saito, Hiroshi

Angstrom-scale flatness using selective nanoscale etching

  1. Takashi Yatsui,
  2. Hiroshi Saito and
  3. Katsuyuki Nobusada
  • Full Research Paper
  • Published 18 Oct 2017

  • PDF

Beilstein J. Nanotechnol. 2017, 8, 2181–2185, doi:10.3762/bjnano.8.217

Surface improvement of organic photoresists using a near-field-dependent etching method

  1. Felix J. Brandenburg,
  2. Tomohiro Okamoto,
  3. Hiroshi Saito,
  4. Benjamin Leuschel,
  5. Olivier Soppera and
  6. Takashi Yatsui
  • Full Research Paper
  • Published 05 Apr 2017

  • PDF

Beilstein J. Nanotechnol. 2017, 8, 784–788, doi:10.3762/bjnano.8.81

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