2 article(s) from Soppera, Olivier

Surface improvement of organic photoresists using a near-field-dependent etching method

  1. Felix J. Brandenburg,
  2. Tomohiro Okamoto,
  3. Hiroshi Saito,
  4. Benjamin Leuschel,
  5. Olivier Soppera and
  6. Takashi Yatsui
  • Full Research Paper
  • Published 05 Apr 2017

  • PDF

Beilstein J. Nanotechnol. 2017, 8, 784–788, doi:10.3762/bjnano.8.81

Challenges in realizing ultraflat materials surfaces

  1. Takashi Yatsui,
  2. Wataru Nomura,
  3. Fabrice Stehlin,
  4. Olivier Soppera,
  5. Makoto Naruse and
  6. Motoichi Ohtsu
  • Review
  • Published 11 Dec 2013

  • PDF

Beilstein J. Nanotechnol. 2013, 4, 875–885, doi:10.3762/bjnano.4.99

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