1 article(s) from Strassner, Johannes
Figure 1: Color plot of the RAS signal during reactive ion etching (RIE) of a partially masked laser substrat...
Figure 2: Transients of the average reflected intensity in arbitrary units (a.u.) at a photon energy of 2.5 e...
Figure 3: Scanning electron microscopy (SEM) image of a facet of a lithographically masked and then reactive-...
Figure 4: SIMS intensity – sputter time profile of the CsAl-signal with logarithmic scaling. Displayed are pr...
Figure 5: Illustrations of the wafer layout and sample design (required in the example) to monitor the etch p...
Figure 6: Single transients of the average reflected intensity (top) and the RAS signal (bottom) at 2.4 eV of...
Figure 7: Scanning electron microscope (SEM) images of a film waveguide lens on a laser ridge. (a) Tilted top...