Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF₃)₄

Alexey Prosvetov,
Alexey V. Verkhovtsev,
Gennady Sushko and
Andrey V. Solov’yov

Full Research Paper
Published 13 Oct 2021

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1. Figure 1: Atomistic IDMD-based simulation protocol of the FEBID process by means of MBN Explorer [19] and MBN Stu...
  
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2. Figure 2: Side view of an optimized single Pt(PF₃)₄ molecule adsorbed on a SiO₂-H substrate. The energy minim...
  
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3. Figure 3: (A) Total electron impact fragmentation cross section of Pt(PF₃)₄ including DEA and DI contribution...
  
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4. Figure 4: A snapshot of the multiscale IDMD simulation of a FEBID process using Pt(PF₃)₄ at the end of the 20...
  
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5. Figure 5: The number of Pt atoms (full spheres) and the total number of atoms including ligands (open spheres...
  
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6. Figure 6: A snapshot of the IDMD simulation of the FEBID process of Pt(PF₃)₄ in the regime of E_dep = 300 kcal...
  
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7. Figure 7: Evolution of the largest cluster in the course of simulation at the end of each FEBID simulation cy...
  
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8. Figure 8: (A) Size distribution of Pt clusters during the first seven FEBID cycles. (B) Difference of size di...
  
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9. Figure 9: Double-log plot of the number of Pt atoms N in the deposited clusters as function of the radius R o...
  
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10. Figure 10: Distribution of the circumvented diameters d of the deposited Pt clusters after several cycles of t...
  
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11. Figure 11: (A) The atomic content of the deposited nanostructure is analyzed by splitting the nanostructure in...
  
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12. Figure 12: Evolution of the height of the grown Pt-containing structure at different FEBID simulation cycles f...
  
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