The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction

• W. Merlijn van Spengen,
• Viviane Turq and
• Joost W. M. Frenken

Beilstein J. Nanotechnol. 2010, 1, 163–171, doi:10.3762/bjnano.1.20

• surface asperities [26]. The static shear strength itself is determined by OH-bridging forces between the surfaces, direct chemical Si–O–Si bonds between the surfaces (the rupturing of these bonds leads to wear of the surfaces in the long run), and/or possibly liquid water meniscus strain or even gluing