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Search for "vapor–liquid–solid" in Full Text gives 27 result(s) in Beilstein Journal of Nanotechnology.

Directed deposition of silicon nanowires using neopentasilane as precursor and gold as catalyst

  • Britta Kämpken,
  • Verena Wulf,
  • Norbert Auner,
  • Marcel Winhold,
  • Michael Huth,
  • Daniel Rhinow and
  • Andreas Terfort

Beilstein J. Nanotechnol. 2012, 3, 535–545, doi:10.3762/bjnano.3.62

Graphical Abstract
  • deposited as a thin film and thermally annealed, but can also be patterned by using UV irradiation, providing access to laterally structured layers of silicon nanowires. Keywords: chemical vapor deposition; gold; nanoparticle; patterning; radiation-induced nanostructures; vapor-liquid-solid mechanism
  • nanosized wires (NW) of silicon including thermal evaporation [9], molecular beam epitaxy [10], laser ablation [11], chemical vapor deposition (CVD) [12] and CVD in combination with the vaporliquidsolid (VLS) method [13]. In the VLS mechanism, small solid metal particles catalyze the decomposition of the
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Published 25 Jul 2012
Graphical Abstract
  • transformation [7]. Silica nanowire films can be fabricated by catalyst-promoted vaporliquidsolid (VLS) or solid–liquid–solid (SLS) processes under high temperature conditions, where metallic nanoparticles such as gold, gallium, and tin as catalysts are generally used to improve nanowire nucleation and growth
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Published 23 Nov 2011
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