The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic Prandtl–Tomlinson model and the simulation of vibration-induced friction reduction

• W. Merlijn van Spengen,
• Viviane Turq and
• Joost W. M. Frenken

Beilstein J. Nanotechnol. 2010, 1, 163–171, doi:10.3762/bjnano.1.20

• with individual atoms or a small part of a crystal lattice on the Ångstrom scale. It was found that regular, repeatable stick-slip behaviour of a contacting highest point (asperity) over the lattice of the other surface forms the very basis of the frictional processes as previously described [2][3]. To

• physically describe the stick-slip behaviour observed, the theories of Prandtl [4] and Tomlinson [5] were used [6][7]. This Prandtl–Tomlinson model has proven to be remarkably effective in describing atomic-scale friction. Further research on atomic-scale friction has resulted in a wealth of information on

• and wear problems [12]. The question is now how to describe friction on the larger scale of actual MEMS devices, which pair micrometer features and nanometer-scale surface roughness with nano- to micro-Newton forces. This friction is characterized by irregular, but repeatable, stick-slip motion. Can