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Search for "(F)EBID" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.

Simulation of electron transport during electron-beam-induced deposition of nanostructures

Francesc Salvat-Pujol,
Harald O. Jeschke and
Roser Valentí

Beilstein J. Nanotechnol. 2013, 4, 781–792, doi:10.3762/bjnano.4.89

during post-growth electron-beam treatments. Keywords: electron backscattering; electron transport; (F)EBID; Monte Carlo simulation; PENELOPE; Introduction Electron-beam-induced deposition (EBID) [1][2][3] is a suitable method for the template-free fabrication of nanostructures. Molecules of a

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Figure 1: Schematic representation of a random trajectory generated by PENELOPE [7]. The trajectory is determine...

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Figure 2: Cylindrical sample geometries used in the simulations. Top: A 300 nm thick amorphous SiO₂ substrate...

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Figure 3: Snapshot of 50 simulated electron trajectories in the SiO₂ substrate (left) and in the nanostructur...

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Figure 4: Inelastic mean free paths for the relevant materials in this work presented in the usual log–log sc...

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Figure 5: (a) Distribution of electrons backscattered and emitted into the vacuum from the substrate in absen...

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Figure 6: Distribution of electrons backscattered and emitted into the vacuum from the substrate in the absen...

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Figure 7: Energy deposited in the system as a function of the depth z for the indicated sample thicknesses d_W...

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Figure 8: Same as Figure 7 for a fixed deposit density (ρ = 10.6092 g/cm³) and a variable tungsten content.

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Figure 9: IMFP in the different deposits with fixed density (ρ = 10.6092 g/cm³) and a variable tungsten conte...

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Figure 10: Same as Figure 7 for a fixed composition (27.5% W, 50.4% C, 22.1% O) and a variable density.

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Figure 11: IMFP in different deposits with fixed composition (27.5% W, 50.4% C, 22.1% O) and a variable densit...

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Figure 12: Charge deposited into the system as a function of the depth z for the indicated sample thicknesses d...

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Figure 13: Distribution of energy deposited in WC_1.75O_0.75 as a function of the depth z and the radial coordin...

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Figure 14: Same as Figure 13 for the charge deposited in WC_1.75O_0.75.

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Published 22 Nov 2013

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