He⁺ FIBID-fabricated 3D AFM tip architectures: an exploratory study of hollow pillars, helices, and spirals

• Alba Arroyo-Fructuoso,
• Ana Galet,
• Gregor Hlawacek and
• Rosa Córdoba

Beilstein J. Nanotechnol. 2026, 17, 863–871, doi:10.3762/bjnano.17.62

• required. Keywords: 3D-printed tips; AFM tips; beam induced nanomanufacturing; focused ion beam induced deposition (FIBID); helium ion microscope; nanohelix; nanopillar; nanospiral; scanning tip microscopy; surface topography; tungsten carbide; Introduction The atomic force microscope (AFM) is a