Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

• Loïc Crouzier,
• Alexandra Delvallée,
• Sébastien Ducourtieux,
• Laurent Devoille,
• Guillaume Noircler,
• Christian Ulysse,
• Olivier Taché,
• Elodie Barruet,
• Christophe Tromas and
• Nicolas Feltin

Beilstein J. Nanotechnol. 2019, 10, 1523–1536, doi:10.3762/bjnano.10.150

• proposes a new approach of hybrid metrology taking advantage of the complementary nature of atomic force microscopy (AFM) and scanning electron microscopy (SEM) techniques for measuring the main characteristic parameters of nanoparticle (NP) dimensions in 3D. The NP area equivalent, the minimal and the

• equality between their height and their lateral diameters. However, discrepancies between AFM and SEM measurements have been observed, showing significant deviation from sphericity as a function of the nanoparticle size. Keywords: AFM; hybrid metrology; nanoparticles; SEM; size distribution; uncertainty

• -emission guns can reach a resolution of 1 nm in the XY-plane. Consequently, we propose in this paper the development of a hybrid metrology that allows for the measurement of the characteristic dimensions of a nano-object in 3D, by combining the measurements performed with AFM and SEM. The concept of hybrid

Nanoscale electrochemical response of lithium-ion cathodes: a combined study using C-AFM and SIMS

• Jonathan Op de Beeck,
• Nouha Labyedh,
• Alfonso Sepúlveda,
• Valentina Spampinato,
• Alexis Franquet,
• Thierry Conard,
• Philippe M. Vereecken,
• Wilfried Vandervorst and
• Umberto Celano

Beilstein J. Nanotechnol. 2018, 9, 1623–1628, doi:10.3762/bjnano.9.154

• hybrid metrology approach combining SPM with SIMS, this is a technique able to observe the actual Li concentration. Using the C-AFM tip as a nanoscaled electrode, we can now stress films at different bias values by scanning over the surface (8.5 min) and subsequently observe the induced conductivity