Beilstein J. Nanotechnol.2010,1, 172–181, doi:10.3762/bjnano.1.21
) surface. All the experiments have been conducted in air, with a relativehumidity of less than 50%. Figure 1 schematically shows the experimental apparatus: the electronic noise level is small enought to detect up to five flexural eigenmodes. The optical lever sensitivity is calibrated by taking the force
PDF
Figure 1:
Block diagram of the optical beam detection system. A typical power spectral density spectrum of th...
Beilstein J. Nanotechnol.2010,1, 163–171, doi:10.3762/bjnano.1.20
.; Frenken, J. W. M. Tribol. Lett. 2007, 28, 149–156.]
Typical 1000-cycle-average friction loops obtained with the tribometer of Figure 1 [19], at 27 °C and a relativehumidity (RH) of 30%. The sliding speed was constant at 5 µm/s. Support position 0 μm is where the loop was started every cycle. This loop is
(determined as depicted in Figure 3) as a function of the normal load is more or less linear on the scale of MEMS devices. The tests were conducted at 27 °C and a relativehumidity of 30%. The fitted friction coefficient is 0.27. Indicated are also the calculated friction force based on an exponential
PDF
Figure 1:
Schematic top view of the MEMS tribometer for studying microscale friction [19]. Several slider types h...