An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

Santiago H. Andany, Gregor Hlawacek, Stefan Hummel, Charlène Brillard, Mustafa Kangül and Georg E. Fantner
Beilstein J. Nanotechnol. 2020, 11, 1272–1279. https://doi.org/10.3762/bjnano.11.111

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An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
Santiago H. Andany, Gregor Hlawacek, Stefan Hummel, Charlène Brillard, Mustafa Kangül and Georg E. Fantner
Beilstein J. Nanotechnol. 2020, 11, 1272–1279. https://doi.org/10.3762/bjnano.11.111

How to Cite

Andany, S. H.; Hlawacek, G.; Hummel, S.; Brillard, C.; Kangül, M.; Fantner, G. E. Beilstein J. Nanotechnol. 2020, 11, 1272–1279. doi:10.3762/bjnano.11.111

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